 | Particle count levels are the basis for definitions of cleanrooms
and their classes. |
 |
"As built"
Cleanroom
 |
Room without process
equipment, product, or personnel present. |
 | Counts prove
capabilities of system design |
|
 |
"At rest"
Cleanroom
 | Room with its full
complement of production equipment present and operating to the
degree possible, without personnel. |
 | Counts evaluate
facilities and equipment and ensure it is operating properly
without compromising cleanroom conditions. |
|
 |
"Operating"
Cleanroom
 |
Room with its full
complement of personnel, and production equipment present and
operating to the degree possible. |
 | Counts prove
"product" will be protected. |
|
|
|
FILTER
LEAK TEST |
 | Filter Types
 | HEPA: A dry-type
filter in a rigid frame having a minimum particle collection
efficiency of 99.97% for 0.3 mm, near-monodisperse
phthalate (DOP) particles (or specified substitute), and a maximum
clean-filter pressure drop of 1.0 inch (25.4 mm) water gauge
(0.249 kPA), when tested at rated airflow capacity. |
 | ULPA: A dry-type
filter in a rigid frame having a minimum particle collection
efficiency of 99.999% for 0.12 mm and
larger. |
|
 | Filter testing
 | Important for
cleanrooms and clean areas classified at Class 100 (M3.5) or
cleaner. |
 | The purpose of filter
testing is to ensure the filter system is properly
installed. The absence of bypass leaks in installation and
filter defects such as pinhole leaks are verified. |
|
 | Bench Leak
Testing
 | Done when there is no
way to test filters when installed. |
 | Verifies filters have
not been damaged in transit or during unpacking and handling. |
 | A similar rig is used
to that used at a factory for probe testing. |
|
|
|
VELOCITY
& UNIFORMITY |
 | The purpose of this test
is to determine the average airflow velocity and/or volume, the
uniformity of airflow, and total airflow provided. |
 | Airflow velocity is the
measurement of the speed of the airflow in feet per minute or
litres per second. |
 | Airflow volume is a measurement of airflow quantity. The total
volume of a system can be determined with this measurement. |
|
|
AIRFLOW
PARALLELISM |
 | The purpose of this test is to show the actual airflow pattern
throughout the work zone. It can also show the effects of
equipment on the airflow. |
|
|
ROOM
PRESSURIZATION |
 |
The purpose of this test is
to verify the capability of the cleanroom system to maintain the
specified pressure differential in the cleanroom. |
 |
The area differential
pressure is a factor of the quantity of air introduced in the room
compared to the quantity taken out of a room. |
|
|
NOISE
LEVEL INTENSITY |
 | The purpose of this test
is to establish the airborne sound pressure levels produced by the
basic cleanroom mechanical and electrical systems.
 |
A-Weighted Sound Level
in decibels (dBA) and octave band sound pressure measured. |
 | For octave band
measurements, the Noise Criterion Level (NC) rating is determined
using the NC Curves. They are a family of curves derived
from many case histories of noise environments and classified for
typical activities. |
|
|
|
LIGHT
INTENSITY |
 | The purpose of the lighting level test is to verify that the levels
and uniformity of the cleanroom lighting systems conform to the
specifications after the room interior is in a completed condition. |
|
|
FLOOR
CONDUCTIVITY |
 |
The purpose of this test is
to measure the impedance, conductivity and continuity of the flooring
system.
 |
The surface of the
conductive floor shall provide a patch of electrical conductivity
between all persons and equipment making contact with the floor. |
 |
The accumulation of
electrostatic discharges with consequent ignition of flammable
gases is prevented. |
|
|
|
TEMPERATURE
& HUMIDITY |
 |
The purpose of these tests
is to demonstrate the capability of the cleanroom mechanical system to
control environmental conditions (temperature and humidity) at the
specified levels required and within the allowable limits specified.
 |
The proper humidity
helps prevent electrostatic discharges with consequent ignition of
flammable gases. |
|
 |
Two levels of temperature
and humidity tests are used.
 |
General temperature and
humidity uniformity tests are suited for normal environmental
requirements. They are used to demonstrate that the
specified levels of temperature and humidity required for occupant
comfort will be maintained. |
 |
Comprehensive
temperature and humidity uniformity tests are for areas requiring
stricter control. |
|
|
|
ELECTROSTATIC
TEST |
 |
The purpose of this test is
to benchmark the airborne positive and negative ion densities, and to
simulate the residual surface voltage expected on the product in free
air.
 |
A static charge on small
components can induce an opposite charge in other objects. |
 |
Discharge across an air
gap may cause a spark that could ignite flammable vapors. |
 |
Static charges on
surfaces will attract and hold contamination. |
|
|